$8.26
$9.72
$12.39
Photonic
1200 nm
355 nm
Laser Debond vs Photonic Debond
Processing cost per wafer
Assumptions: •Glass carrier for 355-nm laser ($100)
•Silicon carrier for 1200-nm laser ($50)
•LAL coated carrier for photonic ($120)
•7 ml of release layer for 300 mm wafers
•15 times carrier reusability in all cases