FULL SAFETY FOR SEMICONDUCTOR MANUFACTURING
FaB
EXHAUST
Software & Services
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Honeywell Safety Suite – An integrated ecosystem of safety applications that enhances safety, productivity and compliance by using connected devices, analytics and workflow automation. This comprehensive software solution is designed to improve safety, increase productivity and simplify compliance management.
SUB-FAB
Measurement & Control
FMCs
Factory Monitoring and Control Systems (FMCS) help monitor, control and manage a manufacturing facility’s machinery performance, material flow, energy consumption and environmental conditions. They can also collect and analyze data to help with decision-making and process improvements to optimize production, reduce energy consumption and increase efficiency.
EXPERION® HS >
ems/bms
Software Detection Solutions
TGMS
Semiconductors process the data and manage the power behind every click, every call, every car and everything critical to modern life. They’re dynamic and specialized, driving innovation across industries with advanced technological capabilities. But they’re also complex, intricate and incredibly difficult to manufacture. Hazardous gases and chemicals are integral to semiconductor fabrication but risk the integrity, efficiency and sterility of highly sensitive manufacturing environments. Qualified, proven safety solutions from Honeywell PMC can help protect products, processes and personnel.
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Service Made Simple – Honeywell's service programs maximize the value of high-tech solutions with options that increase uptime, reduce unpredictable costs and offer additional resources to help complete projects on time and within budget.
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CONTROLEDGE™ DISCRETE PLC >
EMS/BMS – An Environmental Monitoring System (EMS) helps control the temperature, humidity and air quality within a semiconductor manufacturing facility, while a Building Management System (BMS) helps manage mechanical and electrical equipment like HVAC, lighting, power, fire and security assets. Both systems aim to optimize a facility's cleanroom conditions, prevent contamination and ensure product quality.
The Toxic Gas Monitoring System (TGMS) is designed to monitor toxic gas levels and issue alarms and notifications as required. It involves various components such as gas detection equipment, Human Machine Interface (HMI) software and Programmable Logic Controller (PLC) control systems. Honeywell develops reliable, sure, high-performance TGMS to ensure semiconductor and research facilities are safe and in compliance with all regulations. Honeywell’s TGMS is highly user-friendly and makes life easier for first responders.
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Sub-FAB
Vertex™ solutions
Vertex
Vertex M
Vertex Edge
ACM 150
Midas® Solutions
SPM Flex
VC4
Portable Gas & Detection
Portable gas & detection
Multirae
ppbRAE 3000+
BW ULTRA
BW SOLO
SUB-Fab
Without the sub-fab’s support, semiconductor manufacturing in the fab completely stops. Responsible for housing critical infrastructure and maintaining the operational efficiency and effectiveness of the cleanroom environment above, the sub-fab helps detect harmful gases and hazardous chemical concentrations via constant monitoring. Enhance these actions and keep fabrication processes in motion with Honeywell’s advanced gas detection, sensing and management solutions.
FIXED Gas & Detection
Vertex™ – Part of our comprehensive ecosystem of gas detection products and services, the Vertex helps keep sub-fabs safe and efficient with nine Chemcassette® gas analyzers, each with eight points of detection. Its smaller footprint and greater density of points reduce cost per point while gas monitoring and identification are optimized.
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Vertex™ M – With Chemcassette® optics technologies and built-in system redundancies, Vertex M offers sub-fabs reliable and accurate gas detection. It can accept sampling points up to 400 feet from a central unit, monitor a variety of gases with sensitivity as low as parts per billion and use up to 24 points to help keep gas and chemical risks low.
Vertex™ Edge – The Honeywell Vertex Edge 72-point toxic gas monitoring system is cost effective and can be tailored to meet the unique requirements of your sub-fab facility. Not only does this solution detect ultrasensitive gases down to parts per billion in real time, but it also enables the quick, accurate evaluation of gas readings and alarms via its intuitive interface.
SPM Flex – Put quick, accurate gas detection in the palm of your hand with the portable SPM Flex. This single-point, tape-based monitor is quick to detect many hazardous gases, can be used as a fixed solution and can be up and running in less than 2 minutes. With the SPM Flex, safety and efficiency in the sub-fab are prioritized.
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ACM 150 – Boost gas monitoring performance and productivity in the sub-fab with this centralized system that integrates the latest FT-IR technology. With 40 measuring points, 15 gases per measuring point, self-diagnostic programming and communications options that meet unique site requirements, safety and efficiency are streamlined.
VC4 – Based on authentic Chemcassette® technology, the VC4 is a toxic gas monitor with fast gas leak response times and continuous four-point gas detection. It can maximize safety in a sub-fab with definitive, real-time alerts of hazardous gas levels while lowering maintenance and ownership costs with long-life tapes and easy replacements.
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MultiRAE – With the flexibility of up to six gas sensors and convenient wireless portability, this multigas monitor is versatile and customizable. It delivers real-time access to instrument readings and alarm statuses for fast incident response in the sub-fab — advanced detection helps protect personnel, processes and semiconductor products.
ppbRAE 3000+ – Using a third-generation photoionization detector and built-in correction factors for more than 200 compounds, this handheld VOC monitor is designed to help keep sub-fab operations free of harmful gases. It has a 3-second response time, rugged housing for on-the-go detection and parts-per-billion detection capabilities.
Honeywell BW™ Ultra – Find unmatched sensor technology, greater visibility and portable connectivity in the BW Ultra. This five-gas detector meets confined-space detection requirements in the sub-fab for improved indoor air quality and thus, safety. It’s also the first gas detector to feature the 1-Series sensor with fast response and long performance life.
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Honeywell BW™ Solo – As the first single-gas detector with the 1-Series sensor for CO, H2S, O2 and CO2, the BW Solo helps sub-fabs maintain clean, safe conditions. It can detect up to 15 user-selected common and exotic gases in a small, lightweight footprint. As the easiest single-gas detector to service, the BW Solo can lower long-term ownership costs.
Fixed Gas & Detection
XNX™ Universal Transmitter – XNX™ Transmitter is a universal transmitter for toxic, oxygen and combustible gas detection compatible with all Honeywell gas sensing technologies, supports the widest range of sensors on a common platform and offers a modular choice of inputs and outputs.
XNX Universal Transmitter
FS20X Flame Detector – The FS20X Flame Detector represents a quantum leap in integrating Infrared and Ultraviolet sensing technologies. The FS20X is a Multi-Spectrum and UV/Dual IR/VIS Flame Detector with a proven UV solar-blind sensor. The FS20X exhibits faster false-alarm free response to fires over a wider temperature range and with a much longer detection range compared to conventional UV/IR detectors.
FS20X Flame Detector
Midas® solutions
Midas® – Help ensure error-free gas detection in the sub-fab with the Midas. Compact in size but powerful in application, this single-point gas detector uses reliable sensor technology to detect many toxic and flammable gases that risk personnel safety, product quality and productivity. Easy installation and improved visibility maximize sub-fab uptime, too.
Midas
Midas S2
Midas® S2 – Advanced single-point gas detection for sub-fabs is available in a compact footprint with the Midas S2. Its factory-calibrated sensors reduce the need for frequent gas testing, while its communication protocols facilitate easy connectivity and service interactions. A range of sensor cartridges are available to help detect various gases.
Midas® M – This gas detection solution features a 4-in-1 multismart sensor cartridge that helps identify more than 30 hazardous gases in the sub-fab. In addition to its safety and flexibility, this fixed extractive solution has a modular design that makes it easy to install and service over time.
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Midas -M
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FAB
Vertex™ Solutions
fab
A fabrication environment must be highly controlled and ultraclean. Not only does this help prevent unsafe conditions during the use of flammable, toxic chemicals for etching, deposition and doping wafers, but it also helps uphold product quality — for which there’s no room for error over the weeks-to-months-long semiconductor manufacturing process. Explore our breadth of cutting-edge solutions that help maintain ideal, safe and efficient conditions in fab environments.
Vertex™ – Powered by Chemcassette® analyzer technologies, this flexible multipoint toxic gas monitoring system provides up to 72 points of gas detection, a touch screen for easy data access and three months of continuous monitoring. Sampling points can be placed up to 400 feet away from the easily integrated, reliable and accurate Vertex.
Vertex™ M – This flexible gas monitoring system has as little as eight points and up to 24 points of continuous gas detection to fit the needs of your fabrication environment. The Vertex M can accept universal analyzer modules and pyrolyzer analyzers for greater flexibility, enhance uptime and monitor many gases with varying detection requirements.
Vertex™ Edge – The Honeywell Vertex Edge 72-point toxic gas monitoring system is cost effective and can be tailored to meet the unique requirements of your fab facility. Not only does this solution detect ultrasensitive gases down to parts per billion in real time, but it also enables the quick, accurate evaluation of gas readings and alerts via its intuitive interface.
Midas® – To maintain ultraclean, highly sterile conditions in the fab, the Midas — in a noninvasive footprint — uses patented technology to detect more than 35 ultrasensitive toxic gases accurately. It’s small, easy to install for minimal downtime and upgrades any fab with increased visibility and gas detection performance.
Midas® S2 – This fixed, extractive single-point gas transmitter can be used in specialized fab environments to detect gases used or generated during semiconductor manufacturing operations. Instant alerts to gas readings and alarm levels, a reduced need for frequent gas testing and clear visibility come standard with the Midas S2.
Midas® M – Detect more than 30 gases in the fab with speed, precision and ease. The Midas-M is a fixed extractive, 4-in-1 multigas detector that helps protect cleanroom environments from toxic gas leaks during processes like etching and doping. It also has advanced fault diagnostics and automated flow control for efficient fab workflows.
SPM Flex – The SPM Flex is a portable, single-point Chemcassette® tape-based monitor that helps detect ultrasensitive gases — hydrides, mineral acids, oxidizers, etc. — in the fab. Standing up to harsh gases, the lightweight, handheld SPM Flex can be used in potential emergencies or during suspected leaks for greater safety.
VC4 – Advanced Chemcassette® technology, accurate readings and a user-friendly interface help the VC4 deliver low-level gas detection and safety fabs can count on. Equipped with continuous four-point monitoring capabilities, the VC4 enables fast gas leak response times for quick resolution in the event of hazardous conditions or emergencies.
ACM 150 – A centralized gas monitoring system, the ACM 150 can detect up to 15 gases on each of its 40 measuring points and provide proof of response through its state-of-the-art Human Machine Interface (HMI). This enhances gas detection performance in cleanroom environments like the fab were sterility and safety are nonnegotiable.
exhaust
Greater control of exhaust brings greater safety to the fab and sub-fab. But before harmful particles and dangerous gases can be controlled — contained, filtered and neutralized — they have to be detected. Honeywell gas detection solutions and monitoring systems can accurately identify numerous contaminants, byproducts and gases as they’re used and generated, improving air quality, treatment processes and workflow safety.
Vertex™ – No dynamic calibration is required with the Vertex multipoint toxic gas monitoring system for exhaust operations. With accurate gas analyzers, tape-based systems and advanced communication capabilities, this solution can easily measure the severity of gas releases and trigger the right alarms to minimize unsafe conditions in the fab and sub-fab.
Vertex™ M – Safety, efficiency and flexibility are standard for exhaust operations that rely on the Vertex M, a multipoint toxic gas monitoring system with up to 24 points of continuous gas detection. Optics technologies and built-in system redundancies from Chemcassette® help identify various gases and chemicals to help keep fabs and sub-fabs safe.
Vertex™ Edge – Detect ultrasensitive gases in high-tech fab and sub-fab environments with the cost-effective Vertex Edge. This gas monitoring and detection solution pairs accuracy and high performance with simple operation to quickly evaluate gas readings, alarms, event logs, real-time trends and system statuses. And it offers up to 72 points of detection.
Midas® – With its ability to detect more than 35 toxic gases and monitor points up to 100 feet away, the Midas transforms how the fab and sub-fab maintain operational safety and efficiency. It features extended sensor calibration periods and patented diagnostics for improved visibility, error-free detection and a lower cost of ownership.
Midas® S2 – This plug-and-play, advanced single-point gas detector helps identify harmful concentrations of gases used within and generated during fab and sub-fab operations. With a range of precalibrated sensors that can detect various toxic and flammable gases, reliable technology and longer-life components, the Midas S2 elevates exhaust safety.
Midas® M – Choose the Midas-M fixed extractive multigas detector for safer semiconductor manufacturing exhaust operations; with 4-in-1 sensing capabilities, this solution identifies over 33 harmful gases in the fab and sub-fab, and its user interface provides instant alerts of gas readings and alarm levels.
ACM 150 – Require reliable gas detection? The ACM 150 delivers. Its composite sampling of up to four measuring points provides faster measurement in critical fab and sub-fab environments and its state-of-the-art Human Machine Interface provides proof of response. When gas detection performance is high, safety and efficiency are high, too.
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